INFICON . 353-500

BPG400 ATM to Ultra-High Vacuum Gauge The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package. Advantages -direct replacement for ITR 90 Vacuum Transmitters -Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere) -Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5% -The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation -Long-life yttrium oxide coated iridium filament -Optional graphic display and Fieldbus interfaces available -Automatic high vacuum Pirani adjustment reduces operator interventions -RoHS compliance -General vacuum measurement and control in the low to ultra high vacuum range Typical Applications -Pressure measurement in semiconductor process and transfer chambers -Industrial coating -General vacuum measurement and control in the low to ultra high vacuum range